BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator
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Updated
Apr 17, 2024 - GLSL
BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator
This project investigates the Joule heating effect in MEMS microactuators using COMSOL Multiphysics 6.3. By simulating a thermal actuator with two hot arms and one cold arm under a 5V potential, the study analyzes temperature gradients, thermal-electrical interactions, and steady-state differential expansion for micro-scale actuation.
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